EH150VEH300VEH800V
Maximum beam power150 kW300 kW800 kW
Beam power control range   

Power control by VARIOCATHODE 
(space charge limited mode)

~ 20 %
to 100 %		~ 20 %
to 100 %		~ 20 %
to 100 %

Power control by bombardment power 
(temperature limited mode)

~ 0 %
to 20 %		~ 0 %
to 20 %		~ 0 %
to 20 %
Max. acceleration voltage35 kV45 kV60 kV
Average life time of cathodes at max. beam power100 h to 200 h100 h to 200 h200 h to 300 h
Maximum deflection angle
1 kHz system (coil/amplifier)
10 kHz system
20 kHz system

± 40°
± 25°
-

± 40°
± 25°
-

± 45°
± 25°
± 40°

Minimum spot diameter (at distance of 1 m, max. beam power and max. acceleration voltage)
At process pressure of 5*102 Pa
At process pressure of 5*102 Pa

≈ 10 mm
≈ 15 mm

≈ 15 mm
≈ 20 mm		≈ 30 mm
≈ 50 mm
Maximum process pressure≈ 5 Pa≈ 5 Pa≈ 2 Pa
Recommended size of vaccum pumps

Turbomolecular pump
at cathode chamber
Turbomolecular pump
at cathode chamber
Roughing pump for
both turbomolecular pumps

300 l/s

300 l/s

20 m3/h

300 l/s

300 l/s

20 m3/h		500 l/s

1600l/s

35 m3/h
Pump down time< 10 min< 10 min< 15 min
X-ray leakage< µSv/h< µSv/h< µSv/h
Total cooling water consumption0.5 m3/h0.5 m3/h2.2 m3/h
Compressed air supply (dry)0.5 MPa0.5 MPa0.5 MPa
Height (with closed lid)900 mm1010 mm1400 mm
Maximum radius (without vaccum pumps)350 mm350 mm400 mm
Weight150 kg190 kg550 kg
Connection flange of the gunDN 160 ISO-FDN 160 ISO-FDN 250 ISO-F
Connection flanges
for vaccum pumps
Cathode chamber
Intermediate chamber		ISO-F

DN 100
DN 100		ISO-F

DN 100
DN 100		ISO-F

DN 160
DN 250

Materialienauswahl

Metalle (reaktive)
wie z.B. Al, Ti, Ni, Cu, Cr

Metalle (refraktäre bzw. hochschmelzende)
wie z.B. Mo, Ta, Nb, Zr, Hf, V

Edelmetalle
wie z.B. Ir, Rh

Legierungen
wie z.B. Ti6Al4V u.v.a.m. (z.B. für Luft- und Raumfahrt)

Metalloxide
wie z.B. Al2O3 (z.B. Verpackung), ZrO2 (z.B. TBC) u.v.a.m.

Suche