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Cluster Systems Details - Load Lock

Load Lock

Cluster Systems Details - Load Lock with Magazine

Load Lock with Magazine

Cluster Systems Details - Load Lock with Transfer Unit

Load Lock with Transfer Unit

Cluster Systems Details - Loading/­ Unloading Station

Loading/­ Unloading Station The entry load lock chamber enables substrate loading without venting the process chambers of the system. Different versions are available featuring single substrate…

Cluster Systems Details - Transfer Chambers

Transfer Chambers The transfer chambers are equipped with an automatic handling system, which enables a safe transport of the substrates and carriers through the individual chambers of the system. …

Cluster Systems Details

Cluster Systems Details - Pre-/Post-Treatment Chambers

Pre-/Post-Treatment Chambers The pre-treatment chambers can be fitted with components for preparing the substrate for the coating process such as: glow discharge device, inverse…

Cluster Systems Details - Coating Chambers

Coating Chambers The coating chambers can contain different process modules. The available coating processes are sputtering (planar or focal), thermal and e-beam evaporation and PECVD. For…

Cluster Systems Details

Cluster Systems Details