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1704 Treffer:

Cluster Systems Details - Evaporation

Evaporation

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Cluster Systems Details - PECVD

PECVD

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Cluster Systems Details - Heater

Heater

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Cluster Systems Details - Etching

Etching

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Cluster Systems Details - Load Lock

Load Lock

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Cluster Systems Details - Load Lock with Magazine

Load Lock with Magazine

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Cluster Systems Details - Load Lock with Transfer Unit

Load Lock with Transfer Unit

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Cluster Systems Details - Loading/ Unloading Station

Loading/ Unloading Station The entry load lock chamber enables substrate loading without venting the process chambers of the system. Different versions are available featuring single substrate…

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Cluster Systems Details - Transfer Chambers

Transfer Chambers The transfer chambers are equipped with an automatic handling system, which enables a safe transport of the substrates and carriers through the individual chambers of the system. …

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Cluster Systems Details

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